DocumentCode
2748490
Title
Sidewall roughness-induced mode splitting and scattering loss in high Q microdisk resonators: Theory and experiment
Author
Li, Qing ; Eftekhar, Ali A. ; Adibi, Ali
Author_Institution
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fYear
2011
fDate
9-13 Oct. 2011
Firstpage
346
Lastpage
347
Abstract
We report an important experimental observation that in high-Q silicon microdisk resonators, the mode splitting and scattering loss can vary significantly over the azimuthal orders. A theoretical roughness model is developed to explain this phenomenon.
Keywords
integrated optics; light scattering; micro-optomechanical devices; micromechanical resonators; optical losses; optical resonators; silicon-on-insulator; surface roughness; Si; azimuthal orders; high-Q microdisk resonators; scattering loss; sidewall roughness-induced mode splitting; theoretical roughness model; Absorption; Finite element methods; Optical losses; Optical resonators; Scattering; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Conference (PHO), 2011 IEEE
Conference_Location
Arlington, VA
Print_ISBN
978-1-4244-8940-4
Type
conf
DOI
10.1109/PHO.2011.6110569
Filename
6110569
Link To Document