• DocumentCode
    2748490
  • Title

    Sidewall roughness-induced mode splitting and scattering loss in high Q microdisk resonators: Theory and experiment

  • Author

    Li, Qing ; Eftekhar, Ali A. ; Adibi, Ali

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
  • fYear
    2011
  • fDate
    9-13 Oct. 2011
  • Firstpage
    346
  • Lastpage
    347
  • Abstract
    We report an important experimental observation that in high-Q silicon microdisk resonators, the mode splitting and scattering loss can vary significantly over the azimuthal orders. A theoretical roughness model is developed to explain this phenomenon.
  • Keywords
    integrated optics; light scattering; micro-optomechanical devices; micromechanical resonators; optical losses; optical resonators; silicon-on-insulator; surface roughness; Si; azimuthal orders; high-Q microdisk resonators; scattering loss; sidewall roughness-induced mode splitting; theoretical roughness model; Absorption; Finite element methods; Optical losses; Optical resonators; Scattering; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (PHO), 2011 IEEE
  • Conference_Location
    Arlington, VA
  • Print_ISBN
    978-1-4244-8940-4
  • Type

    conf

  • DOI
    10.1109/PHO.2011.6110569
  • Filename
    6110569