• DocumentCode
    2751606
  • Title

    Highly uniform periodic inverse quantum dots arrays

  • Author

    Dias, N.L. ; Garg, A. ; Reddy, U. ; Choi, U. ; Coleman, J.J.

  • Author_Institution
    Univ. of Illinois, Urbana, IL, USA
  • fYear
    2011
  • fDate
    9-13 Oct. 2011
  • Firstpage
    707
  • Lastpage
    708
  • Abstract
    We demonstrate high density, periodic arrays of inverse quantum dots with ±1 nm (σd/d = 0.025) variation of the critical dimension. The effect of this variation on the energy dispersion and intersubband gap is evaluated.
  • Keywords
    etching; optical dispersion; periodic structures; quantum dots; critical dimension; energy dispersion; high density; highly uniform periodic quantum dots arrays; intersubband gap; inverse quantum dots arrays; Dispersion; Electron beams; Geometry; Lattices; Lithography; Quantum dots; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (PHO), 2011 IEEE
  • Conference_Location
    Arlington, VA
  • Print_ISBN
    978-1-4244-8940-4
  • Type

    conf

  • DOI
    10.1109/PHO.2011.6110746
  • Filename
    6110746
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2751606