• DocumentCode
    2752986
  • Title

    Scalable Talbot lithography with an extreme ultraviolet table top laser

  • Author

    Urbanski, L. ; Wachulak, P. ; Isoyan, A. ; Stein, A. ; Menoni, C.S. ; Rocca, J.J. ; Marconi, M.

  • Author_Institution
    NSF ERC for Extreme Ultraviolet Sci. & Technol., Colorado State Univ. Fort Collins, Fort Collins, CO, USA
  • fYear
    2011
  • fDate
    9-13 Oct. 2011
  • Firstpage
    839
  • Lastpage
    840
  • Abstract
    We present a size scalable nano-patterning scheme based on the Talbot effect with extreme ultraviolet laser illumination.
  • Keywords
    Talbot effect; gas lasers; nanopatterning; ultraviolet lithography; Talbot effect; extreme ultraviolet laser illumination; extreme ultraviolet table top laser; scalable Talbot lithography; size scalable nanopatterning; Imaging; Laser beams; Lighting; Lithography; Nanofabrication; Resists; Ultraviolet sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (PHO), 2011 IEEE
  • Conference_Location
    Arlington, VA
  • Print_ISBN
    978-1-4244-8940-4
  • Type

    conf

  • DOI
    10.1109/PHO.2011.6110819
  • Filename
    6110819
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2752986