Development of Precision Robot Manipulator using Flexure Hinge Mechanism

This paper describes a tentative results obtained on the way of developing the nano order precision robot that works with the resolution of 10nm or less. For precision positioning of robot manipulator, we adopt the flexure hinge mechanism composed with notches and holes that allows high stiffness and easy applications to construct the parallel manipulator. As a hardware for in plane motion of manipulator with the workspace of 100mum times 100mum, we suggests 2 kinds of planar parallel driving stage, one is developed using 3 PPR structure, composed with three axes of two prismatic joints and one rotational joint each, and the other is developed using 2 dimensional parallel linear spring mechanism that shows good positioning accuracy up to 3 nm. Next, we implement the 3 dimensional out-of-range motion mechanisms to accomplish the 5 or 6 axes nano order manipulator. Finally, we develop the SMA wire driven micro gripper also using micro hinge mechanism. It may be controlled at the range of 1-2 N of gripping force