• DocumentCode
    2758218
  • Title

    Hermetic Sealing Method For High-speed Mcms

  • Author

    Handa, Tohru ; Iida, Saburo ; Utsunomiya, Jiro ; Sawano, Masayuki

  • fYear
    1993
  • fDate
    9-11 Jun 1993
  • Firstpage
    147
  • Lastpage
    150
  • Keywords
    Ceramics; Conductive films; Dielectric substrates; Firing; Gold; Guidelines; Hermetic seals; Materials reliability; Sealing materials; Thick films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
  • Print_ISBN
    0-7803-1432-8
  • Type

    conf

  • DOI
    10.1109/IEMT.1993.639737
  • Filename
    639737