DocumentCode
2758218
Title
Hermetic Sealing Method For High-speed Mcms
Author
Handa, Tohru ; Iida, Saburo ; Utsunomiya, Jiro ; Sawano, Masayuki
fYear
1993
fDate
9-11 Jun 1993
Firstpage
147
Lastpage
150
Keywords
Ceramics; Conductive films; Dielectric substrates; Firing; Gold; Guidelines; Hermetic seals; Materials reliability; Sealing materials; Thick films;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN
0-7803-1432-8
Type
conf
DOI
10.1109/IEMT.1993.639737
Filename
639737
Link To Document