Polymer films as acoustic matching layers

Author

Hadimioglu, B. ; Khuri-Yakub, B.T.

Author_Institution

XEROX Palo Alto Res. Center, CA, USA

fYear

1990

fDate

4-7 Dec 1990

Firstpage

1337

Abstract

Polymer films such as polyimide and Parylene were investigated as acoustic matching layers at frequencies in the 100-200-MHz range. Polyimide films were spin coated and Parylene films were vapor deposited on silicon and glass substrates, respectively. The impedance, velocity of sound, and acoustic attenuation of these films were measured. The curing temperature of the polyimide films was also varied to determine the dependence of the material properties on processing conditions. The impedances of these films were measured to be in the 2.7 to 3.7 Mrayl range. The measurements indicate that these films promise good transmission efficiencies between most liquids and especially low impedance solids such as silicon, glass, and quartz

Keywords

acoustic impedance; acoustic materials; polymer films; ultrasonic absorption; ultrasonic velocity; 100 to 200 MHz; Parylene; Si substrate; acoustic attenuation; acoustic matching layers; curing temperature; glass substrates; liquids; polyimide; processing conditions; sound velocity; spin coated films; transmission efficiencies; vapour deposited films; Acoustic measurements; Attenuation measurement; Frequency; Glass; Impedance measurement; Polyimides; Polymer films; Semiconductor films; Silicon; Velocity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1990. Proceedings., IEEE 1990

Conference_Location

Honolulu, HI

Type

conf

DOI

10.1109/ULTSYM.1990.171581

Filename

171581