• DocumentCode
    2767163
  • Title

    Electrostatic oscillation of CNT bundles

  • Author

    Wang, Pengbo ; Yan, Xiaojun ; Jiang, Yingqi ; Li, Wei ; Lin, Liwei

  • Author_Institution
    Mech. Eng. Dept., Univ. of California at Berkeley, Berkeley, CA, USA
  • fYear
    2011
  • fDate
    23-27 Jan. 2011
  • Firstpage
    420
  • Lastpage
    423
  • Abstract
    Electrostatic oscillations of conductive CNT bundles have been successfully demonstrated in air environment. Three unique characteristics have been observed and characterized. First, CNT bundles have been constructed by a simple “pick, stick and break” process using a regular probe tip from vertically aligned CNT forest on a silicon substrate. Second, CNT bundles have been actuated statically under applied DC voltages. Third, CNT bundles oscillated following the applied AC input frequencies. As such, this research present electrostatic oscillation of CNT bundles and could potentially open up a new class of actuator/oscillator research for applications in the general field of MEMS and NEMS.
  • Keywords
    carbon nanotubes; electrostatic actuators; elemental semiconductors; micromechanical devices; nanoelectromechanical devices; silicon; C; MEMS; NEMS; Si; carbon nanotubes; conductive CNT bundles; electrostatic oscillation; regular probe tip; silicon substrate; Carbon nanotubes; Electrodes; Electrostatics; Force; Oscillators; Probes; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
  • Conference_Location
    Cancun
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-9632-7
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2011.5734451
  • Filename
    5734451