DocumentCode
2767163
Title
Electrostatic oscillation of CNT bundles
Author
Wang, Pengbo ; Yan, Xiaojun ; Jiang, Yingqi ; Li, Wei ; Lin, Liwei
Author_Institution
Mech. Eng. Dept., Univ. of California at Berkeley, Berkeley, CA, USA
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
420
Lastpage
423
Abstract
Electrostatic oscillations of conductive CNT bundles have been successfully demonstrated in air environment. Three unique characteristics have been observed and characterized. First, CNT bundles have been constructed by a simple “pick, stick and break” process using a regular probe tip from vertically aligned CNT forest on a silicon substrate. Second, CNT bundles have been actuated statically under applied DC voltages. Third, CNT bundles oscillated following the applied AC input frequencies. As such, this research present electrostatic oscillation of CNT bundles and could potentially open up a new class of actuator/oscillator research for applications in the general field of MEMS and NEMS.
Keywords
carbon nanotubes; electrostatic actuators; elemental semiconductors; micromechanical devices; nanoelectromechanical devices; silicon; C; MEMS; NEMS; Si; carbon nanotubes; conductive CNT bundles; electrostatic oscillation; regular probe tip; silicon substrate; Carbon nanotubes; Electrodes; Electrostatics; Force; Oscillators; Probes; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734451
Filename
5734451
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