• DocumentCode
    2769940
  • Title

    Polynomial expression for SAW reflection by aluminium gratings on 128°YX-LiNbO3

  • Author

    Ibata, Koji ; Omori, Tatsuya ; Hashimoto, Ken-Ya ; Yamaguchi, Masatsune

  • Author_Institution
    Graduate Sch. of Sci. & Technol., Chiba Univ., Japan
  • Volume
    1
  • fYear
    1998
  • fDate
    1998
  • Firstpage
    193
  • Abstract
    The paper deals with the derivation of simple polynomials characterising SAW reflection by metallic gratings with various widths and thicknesses. Such polynomial approximation makes it possible to estimate COM parameters in markedly reduced computational time. For very sophisticated SAW devices, this is of great use to develop high-speed simulation and design tools based on COM method. In the present study, it is shown how simply and accurately the SAW reflection by aluminium (Al) gratings on 128°YX-LiNbO3 substrates is characterised by polynomial approximation
  • Keywords
    acoustic wave reflection; aluminium; coupled mode analysis; lithium compounds; polynomial approximation; surface acoustic wave devices; Al; LiNbO3; LiNbO3 substrate; SAW reflection; aluminium metallic grating; coupling of modes method; design; numerical simulation; polynomial approximation; surface acoustic wave device; Aluminum; Computational modeling; Electrodes; Gratings; Metallization; Paper technology; Polynomials; Reflection; Reflectivity; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
  • Conference_Location
    Sendai
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-4095-7
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1998.762127
  • Filename
    762127