DocumentCode
2769940
Title
Polynomial expression for SAW reflection by aluminium gratings on 128°YX-LiNbO3
Author
Ibata, Koji ; Omori, Tatsuya ; Hashimoto, Ken-Ya ; Yamaguchi, Masatsune
Author_Institution
Graduate Sch. of Sci. & Technol., Chiba Univ., Japan
Volume
1
fYear
1998
fDate
1998
Firstpage
193
Abstract
The paper deals with the derivation of simple polynomials characterising SAW reflection by metallic gratings with various widths and thicknesses. Such polynomial approximation makes it possible to estimate COM parameters in markedly reduced computational time. For very sophisticated SAW devices, this is of great use to develop high-speed simulation and design tools based on COM method. In the present study, it is shown how simply and accurately the SAW reflection by aluminium (Al) gratings on 128°YX-LiNbO3 substrates is characterised by polynomial approximation
Keywords
acoustic wave reflection; aluminium; coupled mode analysis; lithium compounds; polynomial approximation; surface acoustic wave devices; Al; LiNbO3; LiNbO3 substrate; SAW reflection; aluminium metallic grating; coupling of modes method; design; numerical simulation; polynomial approximation; surface acoustic wave device; Aluminum; Computational modeling; Electrodes; Gratings; Metallization; Paper technology; Polynomials; Reflection; Reflectivity; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location
Sendai
ISSN
1051-0117
Print_ISBN
0-7803-4095-7
Type
conf
DOI
10.1109/ULTSYM.1998.762127
Filename
762127
Link To Document