DocumentCode
2770030
Title
IDT geometry and crystal cut effects on the frequency-temperature curves of a SAW periodic structure of quartz
Author
Yong, Yook-Kong ; Kanna, Shigeo
Author_Institution
Dept. of Civil & Environ. Eng., Rutgers Univ., Piscataway, NJ, USA
Volume
1
fYear
1998
fDate
1998
Firstpage
223
Abstract
Piezoelectric Lagrangian equations for the frequency-temperature behavior of quartz is presented. A finite element study of these Lagrangian equations is performed for a two-dimensional periodic SAW structure of quartz. Plane strain assumptions are used to enable a two-dimensional analysis of straight crested acoustic waves in the structure. Adaptive finite element meshes are employed to reduce the size of the finite element problem. The frequency-temperature characteristics of the two fundamental SAW modes are compared and contrasted. Numerical results are compared with experimental data for the ST- and K-cut of quartz. The finite element results for the turnover temperature and the 2nd temperature coefficient of the f-t curve as a function of the electrode height are found to compare well with the ST-cut experimental data. Similar numerical results for the change in frequency-temperature characteristics of the K-cut as a function of crystal cut angles phi is also found to be compare well with the experimental data. The experimental data are found to follow the lower bandgap frequency SAW1
Keywords
interdigital transducers; mesh generation; piezoelectric materials; quartz; surface acoustic wave resonators; 2nd temperature coefficient; IDT geometry; SAW periodic structure; SiO2; adaptive finite element meshes; crystal cut effects; electrode height; finite element problem; finite element study; frequency-temperature curves; lower bandgap frequency; piezoelectric Lagrangian equations; plane strain; quartz; straight crested acoustic waves; turnover temperature; two-dimensional analysis; Acoustic waves; Capacitive sensors; Equations; Finite element methods; Frequency; Geometry; Lagrangian functions; Periodic structures; Surface acoustic waves; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location
Sendai
ISSN
1051-0117
Print_ISBN
0-7803-4095-7
Type
conf
DOI
10.1109/ULTSYM.1998.762133
Filename
762133
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