Microfabricated pressure sensing particles with integrated retroreflectors

Author

Chalasani, S. ; Xie, Y. ; Mastrangelo, C.H.

Author_Institution

Univ. of Utah, Salt Lake City, UT, USA

fYear

2011

fDate

23-27 Jan. 2011

Firstpage

1158

Lastpage

1161

Abstract

We report the microfabrication of engineered colorimetric pressure-sensing particles (PSPs) suitable for pressure measurements within microfluidic environments. Each 18-μm diameter particle consists of a semi-transparent elastic shell enclosing a compressible reference vacuum cavity. The flexible shell and compressible cavity form an optical resonator that determines its color. The particle color and corresponding pressure are interrogated optically using conventional white light microscopy. The particle shell includes a molded retroreflector that improves the angular readout efficiency. The particles exhibit a spectral shift pressure sensitivity of -19 nm/MPa with angular interrogation range >;15 deg.

Keywords

colorimetry; microfluidics; microsensors; optical microscopy; optical resonators; pressure measurement; pressure sensors; retroreflectors; spectral line shift; PSP; angular readout efficiency; compressible cavity; compressible reference vacuum cavity; engineered colorimetric pressure-sensing particles; flexible shell cavity; integrated retroreflectors; microfabricated pressure sensing particles; microfabrication; microfluidic environments; molded retroreflector; optical resonator; particle color; particle shell; pressure measurements; semitransparent elastic shell; spectral shift pressure sensitivity; white light microscopy; Atmospheric measurements; Cavity resonators; Optical device fabrication; Optical imaging; Optical reflection; Optical sensors; Reflectivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Conference_Location

Cancun

ISSN

1084-6999

Print_ISBN

978-1-4244-9632-7

Type

conf

DOI

10.1109/MEMSYS.2011.5734636

Filename

5734636