High efficiency wireless electrochemical actuators: Design, fabrication and characterization by electrochemical impedance spectroscopy

Author

Sheybani, R. ; Meng, E.

Author_Institution

Univ. of Southern California, Los Angeles, CA, USA

fYear

2011

fDate

23-27 Jan. 2011

Firstpage

1233

Lastpage

1236

Abstract

A wirelessly-actuated high efficiency Nafion^®-coated MEMS electrochemical actuator is presented. For the first time, high flow rates were achieved (up to 141μL/min, 13mA) under wireless operation and high efficiency pumping (up to 97%) was obtained with Nafion^®-coated electrodes; coating further prevented previously reported current-induced damage to electrodes [1]. Electrochemical impedance spectroscopy (EIS) was used for electrode characterization, electrochemical cleaning, as well as investigation of delamination, electrode polymer coating and surface activation. Parylene and PEEK were investigated as flexible substrate substitutes for soda lime glass. As a result of the combined effect of the rough PEEK surface (increased electrode surface area) and the Nafion^® coating, higher efficiency was achieved compared to glass.

Keywords

coatings; delamination; electrochemical electrodes; microactuators; polymers; EIS; Nafion-coated MEMS electrochemical actuator; Nafion-coated electrodes; PEEK; delamination; electrochemical cleaning; electrochemical impedance spectroscopy; electrode characterization; electrode polymer coating; parylene; soda lime glass; surface activation; wireless electrochemical actuator; Actuators; Coatings; Electrodes; Substrates; Surface impedance; Surface treatment; Wireless communication;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Conference_Location

Cancun

ISSN

1084-6999

Print_ISBN

978-1-4244-9632-7

Type

conf

DOI

10.1109/MEMSYS.2011.5734655

Filename

5734655