Hysteresis modeling and inverse feedforward control of an AFM piezoelectric scanner based on nano images

Atomic force microscope(AFM) is a very important instrument with atomistic level resolution, which has been widely employed in the field of micro/nano technology. As a critical part of AFM system, the piezoelectric scanner exists many defects such as hysteresis, creep, and ease of vibration effects, which has become a bottleneck in its further development and application. In this paper, an image-based method by using polar coordinate is presented to model the piezoelectric scanner utilized in AFM, which can effectively avoid the troubles of data acquisition in AFM system. The parameters of its inverse model are identified by the Least-square method(LSM) and an inverse feedforward control strategy is developed. To verify the performance of this strategy, Being CSPM5500 AFM has been employed, the analysis and performance evaluation have been conducted in detail, which demonstrates that the novel hysteresis model and the image-based inverse feedforward control strategy presented in this paper possess a good performance for AFM nano imaging.