DocumentCode

2774807

Title

Environmentally Responsible Manufacturing

Author

Larrabee, Graydon B.

Author_Institution

Texas Instruments

fYear

1993

fDate

20-21 Sept. 1993

Keywords

Europe; Instruments; Manufacturing processes; Microelectronics;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 1993. International Symposium on

Conference_Location

Austin, TX, USA

Type

conf

DOI

10.1109/ISSM.1993.670303

Filename

670303