DocumentCode
2776980
Title
Gases And Chemicals For ULSI
Author
Richardson, Ralph J.
Author_Institution
Air Products and Chemicals, Inc.
fYear
1993
fDate
20-21 Sept. 1993
Keywords
Chemical industry; Chemical processes; Chemical products; Contacts; Control systems; Gas industry; Gases; Manufacturing processes; Semiconductor device manufacture; Ultra large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location
Austin, TX, USA
Type
conf
DOI
10.1109/ISSM.1993.670313
Filename
670313
Link To Document