DocumentCode
2777029
Title
Resonant interferometric lithography beyond the diffraction limit
Author
Kiffner, M. ; Evers, J. ; Zubairy, M.S.
Author_Institution
Max-Planck-Inst. fur Kernphys., Heidelberg, Germany
fYear
2009
fDate
14-19 June 2009
Firstpage
1
Lastpage
1
Abstract
The authors present a novel approach for the generation of sub-wavelength structures based on interferometric lithography that relies entirely on resonant light-matter interactions. Since the induced pattern does only depend on the ratios of the applied laser field strengths, in principle a near-perfect contrast can be achieved with very low laser intensities.
Keywords
diffraction gratings; optical pulse generation; photolithography; diffraction limit; laser field strengths; resonant interferometric lithography; resonant light-matter interactions; sub-wavelength structure generation; Atomic beams; Interferometric lithography; Laser modes; Nonlinear optics; Optical diffraction; Optical interferometry; Optical pumping; Resists; Resonance; Spatial resolution;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
Conference_Location
Munich
Print_ISBN
978-1-4244-4079-5
Electronic_ISBN
978-1-4244-4080-1
Type
conf
DOI
10.1109/CLEOE-EQEC.2009.5191623
Filename
5191623
Link To Document