• DocumentCode
    2777029
  • Title

    Resonant interferometric lithography beyond the diffraction limit

  • Author

    Kiffner, M. ; Evers, J. ; Zubairy, M.S.

  • Author_Institution
    Max-Planck-Inst. fur Kernphys., Heidelberg, Germany
  • fYear
    2009
  • fDate
    14-19 June 2009
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    The authors present a novel approach for the generation of sub-wavelength structures based on interferometric lithography that relies entirely on resonant light-matter interactions. Since the induced pattern does only depend on the ratios of the applied laser field strengths, in principle a near-perfect contrast can be achieved with very low laser intensities.
  • Keywords
    diffraction gratings; optical pulse generation; photolithography; diffraction limit; laser field strengths; resonant interferometric lithography; resonant light-matter interactions; sub-wavelength structure generation; Atomic beams; Interferometric lithography; Laser modes; Nonlinear optics; Optical diffraction; Optical interferometry; Optical pumping; Resists; Resonance; Spatial resolution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
  • Conference_Location
    Munich
  • Print_ISBN
    978-1-4244-4079-5
  • Electronic_ISBN
    978-1-4244-4080-1
  • Type

    conf

  • DOI
    10.1109/CLEOE-EQEC.2009.5191623
  • Filename
    5191623