DocumentCode
2777199
Title
Development of Quality Control System for Semiconductor Wafer Fabrication Line
Author
Ishikawa, Seiji ; Shimayashiro, Sadao ; Miyazaki, Isao ; Sato, Osamu
Author_Institution
Hitachi, Ltd.
fYear
1993
fDate
20-21 Sept. 1993
Keywords
Costs; Fabrication; Failure analysis; Investments; Manufacturing; Mass production; Performance analysis; Production systems; Quality control; Semiconductor device manufacture;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location
Austin, TX, USA
Type
conf
DOI
10.1109/ISSM.1993.670314
Filename
670314
Link To Document