DocumentCode

2777533

Title

Total Productive Maintenance

Author

Blanc, Andre

Author_Institution

Harris Semiconductor

fYear

1993

fDate

20-21 Sept. 1993

Keywords

Acceleration; Production facilities; Semiconductor device manufacture;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 1993. International Symposium on

Conference_Location

Austin, TX, USA

Type

conf

DOI

10.1109/ISSM.1993.670316

Filename

670316