DocumentCode
2777742
Title
Planning And Scheduling For A Technology Development Fab
Author
Wenstrand, John S.
Author_Institution
Hewlett-Packard Company
fYear
1993
fDate
20-21 Sept. 1993
Keywords
Capacity planning; Companies; Fabrication; Inspection; Integrated circuit technology; Optimized production technology; Process planning; Scheduling algorithm; Technology planning; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1993. International Symposium on
Conference_Location
Austin, TX, USA
Type
conf
DOI
10.1109/ISSM.1993.670317
Filename
670317
Link To Document