DocumentCode
2777813
Title
Analysis Of Cluster Tool Performance In Semiconductor Manufacturing
Author
Mauer, John L. ; Schelasin, Roland E A ; Miller, Peter J.
Author_Institution
Thomas J Watson Research Center
fYear
1992
fDate
28-30 Sep 1992
Firstpage
129
Lastpage
134
Keywords
Parallel processing; Parallel robots; Performance analysis; Process planning; Production facilities; Productivity; Random access memory; Semiconductor device manufacture; Throughput; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Manufacturing Technology Symposium, 1992., Thirteenth IEEE/CHMT International
Print_ISBN
0-7803-0755-0
Type
conf
DOI
10.1109/IEMT.1992.639876
Filename
639876
Link To Document