DocumentCode
2777846
Title
Analytical vs. computational approach of the pull-in voltage of electrostatically actuated micro-bridges
Author
Tibeica, C. ; Voicu, R. ; Bazu, M. ; Ilian, V.E. ; Vasilache, D. ; Galateanu, L. ; Pons, P. ; Yacine, K. ; Flourens, F.
Author_Institution
National Inst. for R&D in Microtechnologies, Bucharest, Romania
Volume
1
fYear
2005
fDate
3-5 Oct. 2005
Firstpage
179
Abstract
Analytical and computational approaches for modeling the electrostatically actuated micro-bridges were compared using the pull-in voltage as behavioral parameter. Sets of FEM-based simulations were performed in order to find out the optimum model applicable for bridge structures and simulation settings needed for converging to the experimental measurements.
Keywords
electrostatic actuators; finite element analysis; superconducting microbridges; FEM-based simulations; behavioral parameter; bridge structures; electrostatically actuated microbridges; pull-in voltage; Analytical models; Bridge circuits; Computational modeling; Electrostatic actuators; Electrostatic analysis; Material properties; Microelectromechanical devices; Predictive models; Residual stresses; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
Print_ISBN
0-7803-9214-0
Type
conf
DOI
10.1109/SMICND.2005.1558741
Filename
1558741
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