Viscous damping of nanoscale resonators for gas composition analysis

Author

Yang Xu ; Lin, J.-T. ; Alphenaar, Bruce W. ; Keynton, R.S.

Author_Institution

Department of Mechanical Engineering, University of Louisville, Louisville, KY

Volume

2

fYear

2006

fDate

17-20 June 2006

Firstpage

773

Lastpage

776

Abstract

The damping effect of various gas environments on a nanoscale resonator is investigated for gas composition analysis. The resonance frequency shift, due to the viscous damping of the cantilever, is found to be directly related to the molar mass of the gas, thereby providing a method to determine the composition of the gas environment. The advantages of this gas analysis method are that it is simple, repeatable, reversible and not limited to reactive gases. The influences of the temperature and the vibration amplitude on the resonance frequency shift are also discussed. Finally, the use of a Raman based spectroscopy technique to determine the temperature of the resonator is described.

Keywords

Piezoresistive detection; Raman spectra; Viscous damping; gas sensor; lateral vibration; resonator; Damping; Electrodes; Gas detectors; Gases; Microcavities; Piezoresistance; Resonance; Resonant frequency; Temperature sensors; Vibrations; Piezoresistive detection; Raman spectra; Viscous damping; gas sensor; lateral vibration; resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on

Print_ISBN

1-4244-0077-5

Type

conf

DOI

10.1109/NANO.2006.247772

Filename

1717222