• DocumentCode
    2786374
  • Title

    Nanoporous Pd Film Sensors for Detection of High Concentration Hydrogen

  • Author

    Ding, Dongyan ; Chen, Zhi

  • Author_Institution
    Department of Electrical and Computer Engineering, University of Kentucky, Lexington, KY 40506, USA
  • Volume
    2
  • fYear
    2006
  • fDate
    17-20 June 2006
  • Firstpage
    777
  • Lastpage
    780
  • Abstract
    Blistering of Pd films upon absorption of high concentration hydrogen is one of the big problems for hindering wide application of Pd-film hydrogen sensors. We fabricated robust nanoporous Pd sensors with anodic aluminum oxide (AAO) as a substrate and Ni as a transition layer. The resistive sensors have a quick and reversible response to hydrogen gas at room temperature. Unlike dense Pd films supported by traditional wafers, the AAO-supported nanoporous films are highly stable in detecting high concentration hydrogen (up to 10% H2).
  • Keywords
    hydrogen sensor; nanoporous Pd; resistance; stablity; Absorption; Gas detectors; Hydrogen; Nanoporous materials; Optical films; Robustness; Semiconductor films; Substrates; Temperature sensors; Thick film sensors; hydrogen sensor; nanoporous Pd; resistance; stablity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on
  • Print_ISBN
    1-4244-0077-5
  • Type

    conf

  • DOI
    10.1109/NANO.2006.247773
  • Filename
    1717223
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2786374