Growth and Hydrogen Sensing Properties Of Carbon Nanotubes Using A MEMS Process

Author

Wei Wei ; Bachman, Mark ; Li, G.P.

Author_Institution

Department of Electrical Engineering and Computer Science, Integrated Nanosystems Research Facilities, Henry Samueli School of Engineering, University of California, Irvine, California 92697

Volume

2

fYear

2006

fDate

17-20 June 2006

Firstpage

894

Lastpage

897

Abstract

A process for integration of a multiwall carbon nanotubes film with a micro-electro-mechanical system (MEMS) resistive heating device has been developed for implementation of a chemical sensing system. MEMS micro-heaters were designed for use both as a local temperature heating unit to control carbon nanotubes growth and as a pulse heating source for resetting sensors during operation. As an example, hydrogensensing experiments were performed in this device. Room temperature detection down to 100 ppm and sensor recovery time around 60 seconds at 100 °C pulsing heating has been observed.

Keywords

MEMS; hydrogen sensor; integration; multi-wall carbon nanotubes; Carbon nanotubes; Chemical processes; Chemical sensors; Heating; Hydrogen; Microelectromechanical systems; Micromechanical devices; Temperature control; Temperature sensors; Thermal sensors; MEMS; hydrogen sensor; integration; multi-wall carbon nanotubes;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2006. IEEE-NANO 2006. Sixth IEEE Conference on

Print_ISBN

1-4244-0077-5

Type

conf

DOI

10.1109/NANO.2006.247804

Filename

1717254