DocumentCode
2790138
Title
Refractive Gauss-to-Tophat beam shapers improve structure quality and speed in micro-machining
Author
Homburg, Oliver ; Toennissen, Frank ; Ganser, Heiko ; Mitra, Thomas ; Lissotschenko, Vitalij
Author_Institution
LIMO-Lissotschenko Mikrooptik GmbH, Bookenburgweg 4-8, 44319 Dortmund, Germany
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
1
Abstract
The transformation principle of a Gaussian beam into a homogeneous top-hat profile by means of free-form refractive micro-optics is reviewed. Various flat-top profiles achieved with different laser sources as well as micro-machining results are demonstrated.
Keywords
Gaussian processes; Laser beams; Laser modes; Optical design; Optical device fabrication; Optical devices; Optical refraction; Power lasers; Production; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location
Baltimore, MD, USA
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/QELS.2007.4431503
Filename
4431503
Link To Document