DocumentCode
2790325
Title
Precision resistor laser trimming for analog microelectronics
Author
Meunier, Michel ; Gagnon, Yves ; Lacourse, Alain ; Ducharme, Mathieu ; Rioux, Simon ; Savaria, Yvon
Author_Institution
Ã\x89cole Polytechnique de Montréal, Laser Processing Laboratory, Department of Engineering Physics, PO box 6079, station Centreville, Montreal (Quebec) H3C 3A7, Canada
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
1
Abstract
A fast, low cost laser trimming technique of highly accurate resistor has been developed for analogue microelectronics. Modelling of the technique is described and an example of tuning a reference voltage circuit is given.
Keywords
Circuits; Laser modes; Laser theory; Laser tuning; Microelectronics; Optical device fabrication; Resistors; Semiconductor lasers; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location
Baltimore, MD, USA
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/QELS.2007.4431515
Filename
4431515
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