DocumentCode
2790995
Title
Nano-optics for chemical and materials characterization
Author
Beversluis, Michael R. ; Stranick, Stephan J.
Author_Institution
National Institute of Standards and Technology, 100 Bureau Drive, Mail Stop 8372, Gaithersburg, MD 20899, USA
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
2
Abstract
We have developed a hybrid microscope which combines structured-illumination techniques with Raman-spectroscopy to record 100 nm resolution images with chemically-specific contrast. We will show images of semiconductor nanostructures and discuss the technique¿s advantages and requirements.
Keywords
Chemicals; Fluorescence; Frequency; Image resolution; Laser beams; Laser excitation; Lighting; Microscopy; Optical imaging; Spatial resolution;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics and Laser Science Conference, 2007. QELS '07
Conference_Location
Baltimore, MD, USA
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/QELS.2007.4431557
Filename
4431557
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