• DocumentCode
    2790995
  • Title

    Nano-optics for chemical and materials characterization

  • Author

    Beversluis, Michael R. ; Stranick, Stephan J.

  • Author_Institution
    National Institute of Standards and Technology, 100 Bureau Drive, Mail Stop 8372, Gaithersburg, MD 20899, USA
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We have developed a hybrid microscope which combines structured-illumination techniques with Raman-spectroscopy to record 100 nm resolution images with chemically-specific contrast. We will show images of semiconductor nanostructures and discuss the technique¿s advantages and requirements.
  • Keywords
    Chemicals; Fluorescence; Frequency; Image resolution; Laser beams; Laser excitation; Lighting; Microscopy; Optical imaging; Spatial resolution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum Electronics and Laser Science Conference, 2007. QELS '07
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/QELS.2007.4431557
  • Filename
    4431557