Design-manufacturing interface for 0.13 micron and below

Summary form only given. This tutorial presents the requirements for the design-manufacturing interface in the upcoming generations of ULSI technologies. We start by presenting an overview of trends in the semiconductor industry: accelerated roadmap which leads to further miniaturization, the increasing role of manufacturing fluctuations, shrinking time to market, product complexity (including SOC) and the overall disaggregation of semiconductor industry (emergence of fabless companies and increasing role of foundries in manufacturing). Then we discuss the current, isolated approach to process development, product design and volume manufacturing. We conclude the tutorial by discussing the technical and organizational challenges that must be overcome to successfully implement this new design-manufacturing interface.