Single die multiple 600V power diodes with vertical voltage terminations and isolation

Integrating multiple power devices in the same die makes their implementation more simple and reliable. In this paper, a new concept for low cost and high efficiency monolithic integration of 600V vertical power diodes is proposed and experimentally validated. The concept relies on the creation of vertical voltage terminations on the periphery of the devices, thus allowing to terminate and to isolate each one of the integrated power devices. Simulation results show that the stress of the electric field can be minimized by introducing an angle on the vertical termination walls. The fabricated prototypes fulfill the initial design electrical specifications with excellent dynamic and operational behavior.