An optical microcantilever with integrated grating coupler

Author

Olcum, Selim ; Karademir, Ertugrul ; Tas, Vahdettin ; Akca, Imran ; Kocabas, Askin ; Atalar, Abdullah ; Aydinli, Atilla

Author_Institution

Dept. of Electr. & Electron. Eng., Bilkent Univ., Ankara, Turkey

fYear

2009

fDate

14-19 June 2009

Firstpage

1

Lastpage

1

Abstract

In this paper, we have fabricated an optical cantilever with an integrated grating coupler. We have used an inexpensive and repeatable method for integrating the grating to the silicon cantilever with a microfabrication compatible process. The sensitivity of the method can be further increased by integrating the detection circuitry onto the cantilever substrate. We believe that this is a promising method for sensing applications which provide a simple yet sensitive measurement technique using microcantilevers.

Keywords

cantilevers; diffraction gratings; elemental semiconductors; integrated optics; micro-optomechanical devices; microfabrication; optical couplers; optical fabrication; silicon; Si; cantilever substrate; integrated grating coupler; microfabrication process; optical microcantilever fabrication; silicon cantilever; Atom optics; Atomic force microscopy; Gratings; Holographic optical components; Holography; Integrated optics; Optical coupling; Optical microscopy; Optical sensors; Optical waveguides;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on

Conference_Location

Munich

Print_ISBN

978-1-4244-4079-5

Electronic_ISBN

978-1-4244-4080-1

Type

conf

DOI

10.1109/CLEOE-EQEC.2009.5192614

Filename

5192614