Low-voltage elctrostatic actuation of droplet on thin superhydrophobic nanoturf

Author

Yun, Kwang-Seok ; Kim, Chang-Jin CJ

Author_Institution

Univ. of California, Los Angeles

fYear

2007

fDate

21-25 Jan. 2007

Firstpage

139

Lastpage

142

Abstract

This paper reports an electrostatic actuation of droplets on a NanoTurf surface. By employing the nanostructured layer instead of a flat and smooth dielectric, both a large driving force and low friction are achieved, presenting a droplet operation at a lower driving voltage compared with general electrowetting-on-dielectric (EWOD) configurations. The dielectric NanoTurf layer is formed on electrodes by using laser interference lithography. With a contact angle of ~170deg and its hysteresis of ~5deg on syperhydrophobic NanoTurf, water droplets are actuated at ~24 V, much lower than general EWOD.

Keywords

electrostatic actuators; laser beam machining; low-power electronics; microactuators; microfluidics; photolithography; dielectric NanoTurf layer; droplet operation; laser interference lithography; low-voltage electrostatic actuation; nanostructured layer; thin superhydrophobic NanoTurf; water droplets; Dielectrics; Electrodes; Electrostatic actuators; Friction; Hysteresis; Permittivity; Surface resistance; Surface structures; Surface tension; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Conference_Location

Hyogo

ISSN

1084-6999

Print_ISBN

978-1-4244-095-5

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2007.4433035

Filename

4433035