Research on integrated micromanipulator and its application in microassembly

Author

Rong, Weibin ; Sun, Lining ; Chen, Liguo

Author_Institution

Robot Res. Inst., Harbin Inst. of Technol., China

Volume

2

fYear

2003

fDate

8-13 Oct. 2003

Firstpage

831

Abstract

Micromanipulator is the key component of a micromanipulating robot. According to the principle of piezoelectric scanner, a three degree-of-freedom micromanipulator driven by piezoelectric tubes is developed. The integration of mechanism, actuator and sensor is realized. The formula establishing the relationship between microdisplacement and driving voltage is given. The micropositioning control system is introduced, including the bipolar piezoelectric driver and micropositioning measuring system. Some static and dynamic characteristics of the micromanipulator are gained. Based on this, the micromanipulator is applied to a micromanipulating robot. Thanks to micro-vision and micro-force perceiving, macro-micro-positioning is performed. As a result, the peg-in-hole with diameter of 0.2 mm is finished successfully by rational microassembly strategy.

Keywords

microactuators; microassembling; micromanipulators; micropositioning; microsensors; piezoelectric actuators; 0.2 mm; bipolar piezoelectric driver; degree of freedom; dynamic characteristics; integrated micromanipulator; microassembly; microdisplacement; microforce perceiving; micromanipulating robot; micropositioning control system; micropositioning measuring system; microvision perceiving; peg-in-hole; piezoelectric scanner; piezoelectric tubes; static characteristics; Biomedical signal processing; Electrodes; Microassembly; Micromanipulators; Microscopy; Piezoelectric actuators; Robot sensing systems; Robotic assembly; Strain measurement; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics, Intelligent Systems and Signal Processing, 2003. Proceedings. 2003 IEEE International Conference on

Print_ISBN

0-7803-7925-X

Type

conf

DOI

10.1109/RISSP.2003.1285694

Filename

1285694