Silicon-organic hybrid fabrication platform for integrated circuits

Author

Korn, D. ; Alloatti, L. ; Lauermann, M. ; Pfeifle, J. ; Palmer, R. ; Schindler, Philipp C. ; Freude, W. ; Koos, C. ; Leuthold, Juerg ; Hui Yu ; Bogaerts, W. ; Komorowska, K. ; Baets, Roel ; Van Campenhout, J. ; Verheyen, P. ; Wouters, Jan ; Moelants, M. ;

Author_Institution

Inst. of Photonics & Quantum Electron. (IPQ), Karlsruhe Inst. of Technol. (KIT), Karlsruhe, Germany

fYear

2012

fDate

2-5 July 2012

Firstpage

1

Lastpage

4

Abstract

The combination of CMOS compatible Silicon-On-Insulator (SOI) fabrication technology with organic cover materials constitutes the Silicon-Organic Hybrid (SOH) fabrication platform, which shows innovative functionality for the making of integrated optical circuits. We report on experimental demonstrations of essential building blocks for transceivers, while relying only on well-known SOI processing steps and simple post processing of the organic materials.

Keywords

CMOS integrated circuits; elemental semiconductors; integrated optics; optical transceivers; silicon; silicon-on-insulator; CMOS compatible silicon-on-insulator fabrication technology; SOI processing steps; Si; integrated circuits; integrated optical circuits; organic cover materials; organic materials; silicon-organic hybrid fabrication platform; transceivers; Electrooptical waveguides; Modulation; Optical device fabrication; Silicon; electro-optic devices; modulators; photonic integrated circuits; silicon-on-insulator; silicon-organic hybrid;

fLanguage

English

Publisher

ieee

Conference_Titel

Transparent Optical Networks (ICTON), 2012 14th International Conference on

Conference_Location

Coventry

ISSN

2161-2056

Print_ISBN

978-1-4673-2228-7

Electronic_ISBN

2161-2056

Type

conf

DOI

10.1109/ICTON.2012.6254470

Filename

6254470