Electron emission behaviors of ferroelectric materials

Author

Sidorkin, V.A. ; Bourim, E.M. ; Kim, D.-W. ; Moon, C.W. ; Yoo, In K.

Author_Institution

Samsung Adv. Inst. of Technol., Suwon, South Korea

fYear

2003

fDate

28-30 May 2003

Firstpage

311

Lastpage

312

Abstract

In this work electron emission generated by polarization switching of ferroelectrics has been investigated. In this work special measurement techniques were used to study the electron emission behaviors. Electron-beam resist coated wafers were used to obtain spatial distribution of the emitted electrons. Triglycine sulphate crystals was studied by varying experimental conditions and heat treatment conditions of the samples. Surface flashover plasma of a ferroelectric origin was observed on a polar ferroelectric surface. In our work plasma formation is proved by correlation between the main switching parameters and emission of electrons from ferroelectrics-coercive field and threshold field of emission.

Keywords

coercive force; dielectric polarisation; electron emission; electron resists; ferroelectric materials; ferroelectric switching; heat treatment; organic compounds; surface plasmons; coercive field; electron beam resist coated wafers; electron emission behaviors; ferroelectric materials; heat treatment; polar ferroelectric surface; polarization switching; surface flashover plasma; switching parameters; triglycine sulphate crystals; Crystals; Electron emission; Ferroelectric materials; Flashover; Heat treatment; Measurement techniques; Plasma measurements; Polarization; Resists; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Electronics, 2003 4th IEEE International Conference on

Print_ISBN

0-7803-7699-4

Type

conf

DOI

10.1109/IVEC.2003.1286334

Filename

1286334