System modeling of MEMS Gyroscopes

This paper presents a systematic approach to obtain governing equations of Micro Electro Mechanical Gyroscopes. The focus will be on vibratory type and its mechanical parameters, involved in modeling and designing, will be discussed due to their deep impact on overall performance of Gyroscopes. Natural resonant frequency, fabrication imperfections and their source will also be introduced and taken into account. Finally, governing equations will be obtained and used to derive the dynamic equations of the system for driven and sense axes of MEMS Gyroscopes which are widely used as a basis for implementation of control schemes. Simulation results will be presented to show the compliance of the derived dynamic equations with a standard second order system.