Design and simulation of a self-assembled MEMS force sensor for Minimally Invasive Surgery

Author

Gutiérrez-Cándano, H. ; Camacho-León, S. ; Dieck-Assad, G. ; Martínez-Chapa, S.O.

Author_Institution

Dept. of Electr. & Comput. Eng., Tecnol. de Monterrey (ITESM), Monterrey, Mexico

fYear

2011

fDate

22-24 Feb. 2011

Firstpage

289

Lastpage

291

Abstract

This work describes the design and Finite Element Method (FEM) simulation of an integrated force microsensor which introduces a self-assembled tactile structure with potential application to Minimally Invasive Surgery (MIS). The sensor is designed to be compatible with Complementary Metal-Oxide-Semiconductor-Micro-Electro-Mechanical Systems (CMOS-MEMS) technology under monolithic microfabrication processes, and allows force measurements up to the micronewton scale.

Keywords

CMOS integrated circuits; bioMEMS; biomedical equipment; finite element analysis; force sensors; microsensors; self-assembly; surgery; CMOS-MEMS technology; complementary metal-oxide-semiconductor-micro-electro-mechanical systems; finite element method simulation; integrated force microsensor; minimally invasive surgery; monolithic microfabrication processes; self-assembled MEMS force sensor; self-assembled tactile structure; Etching; Metals; Micromechanical devices; Resists; Sensors; Substrates; Surgery; Micro-Electro-Mechanical Systems (MEMS); Minimally Invasive Surgery (MIS); force sensing; self-assembling microstructures;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors Applications Symposium (SAS), 2011 IEEE

Conference_Location

San Antonio, TX

Print_ISBN

978-1-4244-8063-0

Type

conf

DOI

10.1109/SAS.2011.5739819

Filename

5739819