DocumentCode
2815856
Title
Remote electromagnetic excitation of miniaturized in-plane plate resonators for sensing applications
Author
Reichel, Erwin K. ; Riesch, Christian ; Keplinger, Franz ; Jakoby, Bernhard
Author_Institution
Inst. for Microelectron. & Microsensors, Johannes Kepler Univ., Linz
fYear
2008
fDate
19-21 May 2008
Firstpage
144
Lastpage
147
Abstract
For the purpose of measuring the viscosity of complex structured liquids, a novel type of resonator is employed. A metallic frame with a spring-mounted plate in its center is placed in a magnetic field exhibiting a constant and a superposed sinusoidal component. This way, a dominant in-plane motion is excited. The numerical analysis of the frequency response shows a useable viscosity range up to approx. 1 Paldrs in a frequency range below 1500 Hz. Experiments demonstrate the feasibility of the concept, which is suited for further miniaturization.
Keywords
electric sensing devices; electromagnetic fields; frequency response; microsensors; resonators; viscosity measurement; frequency response numerical analysis; miniaturized in-plane plate resonators; remote electromagnetic excitation; viscosity measurement; Acoustic sensors; Biomedical measurements; Coils; Frequency; Magnetic field measurement; Magnetic fields; Magnetic levitation; Magnetic sensors; Springs; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2008 IEEE International
Conference_Location
Honolulu, HI
ISSN
1075-6787
Print_ISBN
978-1-4244-1794-0
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2008.4622976
Filename
4622976
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