• DocumentCode
    2815856
  • Title

    Remote electromagnetic excitation of miniaturized in-plane plate resonators for sensing applications

  • Author

    Reichel, Erwin K. ; Riesch, Christian ; Keplinger, Franz ; Jakoby, Bernhard

  • Author_Institution
    Inst. for Microelectron. & Microsensors, Johannes Kepler Univ., Linz
  • fYear
    2008
  • fDate
    19-21 May 2008
  • Firstpage
    144
  • Lastpage
    147
  • Abstract
    For the purpose of measuring the viscosity of complex structured liquids, a novel type of resonator is employed. A metallic frame with a spring-mounted plate in its center is placed in a magnetic field exhibiting a constant and a superposed sinusoidal component. This way, a dominant in-plane motion is excited. The numerical analysis of the frequency response shows a useable viscosity range up to approx. 1 Paldrs in a frequency range below 1500 Hz. Experiments demonstrate the feasibility of the concept, which is suited for further miniaturization.
  • Keywords
    electric sensing devices; electromagnetic fields; frequency response; microsensors; resonators; viscosity measurement; frequency response numerical analysis; miniaturized in-plane plate resonators; remote electromagnetic excitation; viscosity measurement; Acoustic sensors; Biomedical measurements; Coils; Frequency; Magnetic field measurement; Magnetic fields; Magnetic levitation; Magnetic sensors; Springs; Viscosity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium, 2008 IEEE International
  • Conference_Location
    Honolulu, HI
  • ISSN
    1075-6787
  • Print_ISBN
    978-1-4244-1794-0
  • Electronic_ISBN
    1075-6787
  • Type

    conf

  • DOI
    10.1109/FREQ.2008.4622976
  • Filename
    4622976