Study on the control system of piezoelectric ceramics micro-positioning stage

Author

Yang, Guihua ; Liu, Dianting

Author_Institution

Coll. of Mech. & Control Eng., Guilin Univ. of Technol., Guilin, China

fYear

2011

fDate

15-17 July 2011

Firstpage

6161

Lastpage

6164

Abstract

Based on the nonlinearity of the piezoelectric devices such as hysteresis and creep, posioning control of the piezoelectric ceramics micro-positioning stage gets difficult. The multiple control scheme that a feedforward control based on model combines with a fuzzy self-adjusting PID(proportion-integral-derivative) control is proposed. Matlab6.5 software is acted as experimental development platform, and the control scheme is implemented in it. The result showed that positioning accuracy and regulation speed of the control system is satisfied.

Keywords

control nonlinearities; control system analysis; feedforward; fuzzy control; micropositioning; piezoceramics; self-adjusting systems; velocity control; Matlab6.5 software; control system; feedforward control; fuzzy self-adjusting control; micropositioning; nonlinearity; piezoelectric ceramics; speed regulation; Ceramics; Control engineering; Fuzzy control; Piezoelectric actuators; Piezoelectric devices; Solid modeling; feedford control; fuzzy control; piezoelectric actuator;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechanic Automation and Control Engineering (MACE), 2011 Second International Conference on

Conference_Location

Hohhot

Print_ISBN

978-1-4244-9436-1

Type

conf

DOI

10.1109/MACE.2011.5988444

Filename

5988444