DocumentCode
2820291
Title
Development of 90Nm InGaAs HEMTs and Benchmarking Logic Performance with Si CMOS
Author
Cheng, Kuang-Yu (Donald) ; Chan, Doris ; Tan, Fei ; Xu, Huiming ; Feng, Milton ; Ko, Chih-Hsin ; Wann, Clement
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA
fYear
2010
fDate
3-6 Oct. 2010
Firstpage
1
Lastpage
4
Abstract
We have developed 90nm In0.7Ga0.3As channel HEMTs, directly measured of DC and RF characteristics, and performed microwave modeling for both 90nm Si CMOS and HEMT for benchmarking logic performance for future design layout and process improvement.
Keywords
CMOS integrated circuits; III-V semiconductors; benchmark testing; high electron mobility transistors; indium compounds; silicon; CMOS; HEMT; In0.7Ga0.3As; Si; benchmarking logic performance; microwave modeling; size 90 nm; CMOS integrated circuits; HEMTs; Indium gallium arsenide; Logic gates; MODFETs; MOSFET circuits; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Compound Semiconductor Integrated Circuit Symposium (CSICS), 2010 IEEE
Conference_Location
Monterey, CA
ISSN
1550-8781
Print_ISBN
978-1-4244-7437-0
Electronic_ISBN
1550-8781
Type
conf
DOI
10.1109/CSICS.2010.5619674
Filename
5619674
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