3D silicon turning micromirror

Author

Chen, Shi-Hao ; Chien, Chao-Heng

Author_Institution

Dept. of Mech. Eng., Tatung Univ., Taipei, Taiwan

fYear

2003

fDate

5-7 May 2003

Firstpage

201

Lastpage

203

Abstract

The concept of designing a 3D silicon turning mirror is combine the two of 2D comb drivers. The turning mirror is driven by electrostatic force with vertical comb fingers. The upper comb driver is composed of a turning mirror plate, two pairs of torsion beams, a supporting frame and vertical comb fingers. The lower comb driver is composed of vertical comb fingers, and a supporting frame, signal lines and pads is based on the Pyrex glass substrate. The both comb drivers could be assembled by flip chip bonding. This turning mirror can be used for laser display, scanner, barcode reader, optical switch etc. The 3D turning micromirror is designed by MEMS Designer. The fabrication processes are mainly composed of comb fabrication and assembling process. The Deep RIE applied to etch the depth of finger layer of comb driver, and MEMS surface micromachine applied to deposit the signal lines and pads on the Pyrex glass substrate. Then, the flip chip bonding technique is applied to bond two comb drivers.

Keywords

elemental semiconductors; etching; micromachining; micromechanical devices; micromirrors; silicon; sputter etching; 2D comb drivers; 3D silicon turning micromirror; MEMS designer; MEMS surface micromachining; Pyrex glass substrate; Si; barcode reader; deep RIE; electrostatic force; etching; flip chip bonding; laser display; optical switch; scanner; torsion beams; turning mirror plate; vertical comb fingers; Assembly; Bonding; Fingers; Flip chip; Glass; Micromechanical devices; Micromirrors; Mirrors; Silicon; Turning;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on

Print_ISBN

0-7803-7066-X

Type

conf

DOI

10.1109/DTIP.2003.1287036

Filename

1287036