DocumentCode
2823242
Title
Microfabrication of electroplated integrated chromium tips onto a silicon actuator
Author
Lennon, E. ; Ayela, Fridiric
Author_Institution
Centre de Recherches sur les Tres Basses Temperatures, CNRS, Grenoble, France
fYear
2003
fDate
5-7 May 2003
Firstpage
353
Lastpage
355
Abstract
Electrodeposition has been claimed as an alternative and emerging technique devoted to the fabrication of tall microstructures. Various metals and alloys can be electroplated with micrometric dimensions and the lithography techniques allow the realizations of various patterns. We present a new process devoted to the microfabrication of a chromium tip from an electroplated microstructure. The aim of this work is the realization of a new scanning microscope to perform local thermal conductivity measurements of thin films.
Keywords
chromium; crystal microstructure; electroplating; metallic thin films; thermal conductivity; Cr; Si; electrodeposition; electroplated integrated chromium tips; electroplated microstructure; lithography technique; microfabrication; micrometric dimension; microstructures; scanning microscope; silicon actuator; thermal conductivity; thin films; Actuators; Chromium; Conductivity measurement; Fabrication; Lithography; Microscopy; Microstructure; Performance evaluation; Silicon; Thermal conductivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN
0-7803-7066-X
Type
conf
DOI
10.1109/DTIP.2003.1287067
Filename
1287067
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