DocumentCode
2847613
Title
Current crowding on metal contacts to planer devices
Author
Murrmann, H. ; Widmann, Daniel
Author_Institution
Siemans AG, Munich, Germany
Volume
XII
fYear
1969
fDate
19-21 Feb. 1969
Firstpage
162
Lastpage
163
Abstract
The results of a theoretical and experimental investigation of contact resistance and current distribution in metal-to-silicon contacts of planar devices will be presented. Typical experimental values of the transition resistance between metal and diffusion layers will be offered.
Keywords
Conductivity; Contact resistance; Current distribution; Electric resistance; Geometry; Impurities; Metalworking machines; Proximity effect; Surface resistance; Transmission lines;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1969 IEEE Internationa
Conference_Location
Philadelphia, PA, USA
Type
conf
DOI
10.1109/ISSCC.1969.1154703
Filename
1154703
Link To Document