A novel thermally-actuated silicon micropump

Author

Zou, J. ; Ye, X.Y. ; Zhou, Z.Y. ; Yang, Y.

Author_Institution

Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China

fYear

1997

fDate

1997

Firstpage

231

Lastpage

234

Abstract

The thermal dynamics of a bimetallic microactuator in micropump are analyzed by using FEM. On the basis of the analysis, a novel thermally-actuated silicon micropump is developed. This micropump utilizes both bimetallic thermal actuation and thermal pneumatic actuation. The bimetallic microactuator is composed of an aluminum membrane and a silicon membrane. An air chamber is also designed to realize the thermal pneumatic actuation. A new micro check valve is developed through surface micromachining. This microvalve has a high reverse-to-forward flow resistance and a very small reverse leakage

Keywords

elemental semiconductors; finite element analysis; microactuators; microfluidics; micromachining; micropumps; microvalves; pneumatic control equipment; silicon; temperature distribution; Al; FEM analysis; Si; air chamber; aluminum membrane; bimetallic microactuator; bimetallic thermal actuation; heat transfer; high reverse-to-forward flow resistance; micro check valve; microfluidic systems; silicon membrane; surface micromachining; temperature field model; thermal dynamics; thermal pneumatic actuation; thermally-actuated silicon micropump; very small reverse leakage; Actuators; Atmospheric modeling; Biomembranes; Microactuators; Micromechanical devices; Micropumps; Microvalves; Silicon; Temperature; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Micromechatronics and Human Science, 1997. Proceedings of the 1997 International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-4171-6

Type

conf

DOI

10.1109/MHS.1997.768885

Filename

768885