DocumentCode

2855340

Title

An experimental high-density memory array fabricated with electron beam

Author

Yu, Haoyong ; Dennard, R. ; Chang, Ting-Hao ; Hatzakis, M.

Author_Institution

IBM T. J. Watson Research Center, Yorktown Heights, NY, USA

Volume

XVI

fYear

1973

fDate

14-16 Feb. 1973

Firstpage

98

Lastpage

99

Keywords

Aluminum; Capacitance; Electron beams; Geometrical optics; Integrated circuit technology; Large scale integration; Lithography; Resists; Silicon; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference. Digest of Technical Papers. 1973 IEEE International

Conference_Location

Philadelphia, PA, USA

Type

conf

DOI

10.1109/ISSCC.1973.1155176

Filename

1155176