• DocumentCode
    2860232
  • Title

    Modeling and feedforward control of a large-range, piezo nano-stepper

  • Author

    Wilcox, S. ; Devasia, S.

  • Author_Institution
    Dept. of Mech. Eng., Univ. of Washington, Seattle, WA, USA
  • fYear
    2011
  • fDate
    June 29 2011-July 1 2011
  • Firstpage
    2855
  • Lastpage
    2860
  • Abstract
    This article aims to improve the positioning performance of piezo-based nano-steppers, which have both large range and high-precision. The main contribution of this article is to show that model-based feedforward input can improve the performance of piezo-based nano-steppers by enabling operation at higher frequencies.
  • Keywords
    control system synthesis; feedforward; piezoelectric actuators; position control; model based feedforward input; piezo based nanostepper; positioning performance; Actuators; Dynamics; Force; Friction; Steady-state; Trajectory; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    American Control Conference (ACC), 2011
  • Conference_Location
    San Francisco, CA
  • ISSN
    0743-1619
  • Print_ISBN
    978-1-4577-0080-4
  • Type

    conf

  • DOI
    10.1109/ACC.2011.5991591
  • Filename
    5991591
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2860232