DocumentCode
2867496
Title
2000 ASMC keynote speakers
fYear
2000
fDate
12-14 Sept. 2000
Firstpage
472
Lastpage
480
Abstract
Provides an abstract of the keynote presentation and a brief professional biography of the presenters. The complete presentation was not made available for publication as part of the conference proceedings.
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 2000 IEEE/SEMI
Conference_Location
Boston, MA, USA
ISSN
1078-8743
Print_ISBN
0-7803-5921-6
Type
conf
DOI
10.1109/ASMC.2000.902632
Filename
902632
Link To Document