GaN-based photonic crystals and integrated optics

Author

Rosenberg, A. ; Carter, Michael W. ; Casey, J.A. ; Kim, Mijin ; Holm, Ronald T. ; Henry, Richard L. ; Mastro, M.A. ; Eddy, Charles R. ; Shamamian, V.A. ; Bussmann, K.

Author_Institution

Naval Res. Lab., Washington, DC

fYear

2006

fDate

21-26 May 2006

Firstpage

1

Lastpage

2

Abstract

We have developed growth techniques for GaN-based multilayer films suitable for low-loss optical waveguides, as well as precision patterning for integrated optics and photonic crystal structures with sub-100 nm critical features.

Keywords

III-V semiconductors; gallium compounds; integrated optics; nanopatterning; nanophotonics; optical fabrication; optical multilayers; optical waveguides; photonic crystals; semiconductor growth; semiconductor thin films; wide band gap semiconductors; GaN; growth technique; integrated optics; low-loss optical waveguides; multilayer films; photonic crystal structures; precision patterning; size 100 nm; Gallium nitride; Integrated optics; Optical devices; Optical films; Optical resonators; Optical sensors; Optical waveguides; Optoelectronic and photonic sensors; Photonic crystals; Slabs; (230.3990) Microstructure devices; (230.5750) Resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on

Conference_Location

Long Beach, CA

Print_ISBN

978-1-55752-813-1

Electronic_ISBN

978-1-55752-813-1

Type

conf

DOI

10.1109/CLEO.2006.4628135

Filename

4628135