• DocumentCode
    2869821
  • Title

    Sensors and MEMS

  • Author

    Yoon, Euisik ; Ayazi, Farrokh

  • Author_Institution
    University of Minnesota, Minneapolis, MN
  • fYear
    2007
  • fDate
    11-15 Feb. 2007
  • Firstpage
    378
  • Lastpage
    379
  • Keywords
    CMOS process; CMOS technology; Capacitive sensors; Integrated circuit technology; Magnetic field induced strain; Magnetic sensors; Micromechanical devices; Paper technology; Temperature sensors; Wireless sensor networks;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 2007. ISSCC 2007. Digest of Technical Papers. IEEE International
  • Conference_Location
    San Francisco, CA, USA
  • ISSN
    0193-6530
  • Print_ISBN
    1-4244-0853-9
  • Electronic_ISBN
    0193-6530
  • Type

    conf

  • DOI
    10.1109/ISSCC.2007.373452
  • Filename
    4242423
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2869821