DocumentCode
2872834
Title
Challenges for predictive process simulation in sub 0.1μ silicon devices
Author
Plummer, J.D.
Author_Institution
Stanford University
fYear
1994
fDate
1994
Firstpage
1
Lastpage
4
Keywords
Circuit simulation; Circuit synthesis; Computational modeling; Design automation; Ion implantation; Manufacturing processes; Predictive models; Semiconductor device modeling; Semiconductor process modeling; Silicon devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type
conf
DOI
10.1109/EDMS.1994.771096
Filename
771096
Link To Document