• DocumentCode
    2873497
  • Title

    Interdisciplinary characterization of sandwiched SiGe thin layers grown by molecular beam epitaxy

  • Author

    Feng, Z.C. ; Arbet-Engels, V. ; Kumsiri, R.P.G. ; Wang, K.L. ; Walta, F. ; Lee, K.K. ; Wee, A.T.S. ; Hng, H.H. ; Williams, K.P.J.

  • Author_Institution
    National University of Singapore
  • fYear
    1994
  • fDate
    1994
  • Firstpage
    39847
  • Lastpage
    40942
  • Keywords
    Germanium silicon alloys; Infrared spectra; Mass spectroscopy; Molecular beam epitaxial growth; Photoluminescence; Plasma temperature; Raman scattering; Silicon germanium; X-ray diffraction; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
  • Type

    conf

  • DOI
    10.1109/EDMS.1994.771134
  • Filename
    771134
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2873497