DocumentCode
2873890
Title
Composition of selectively grown GaxIn1-xP from high resolution double-crystal x-ray measurement
Author
Chan, Shih-Hsiung ; Sze, Simon M. ; Chang, Chun-Yen
Author_Institution
National Chiao Tung University
fYear
1994
fDate
1994
Firstpage
45754
Lastpage
46850
Keywords
Chemical vapor deposition; Epitaxial growth; Gain measurement; Gallium arsenide; Indium phosphide; Insulation; MOCVD; Plasma temperature; Quantum dots; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type
conf
DOI
10.1109/EDMS.1994.771206
Filename
771206
Link To Document